Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications

Handle URI:
http://hdl.handle.net/10754/235134
Title:
Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications
Authors:
Elshurafa, Amro M.; Salama, Khaled N. ( 0000-0001-7742-1282 )
Abstract:
In this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S-band frequencies. The self-resonant frequencies of the fabricated capacitors were close to 10GHz, which is better than that of the parallel-plate capacitor, which measured only 5.5GHz. Further, the presented capacitors provided a higher capacitance when compared with the state-of-the-art-reported MEMS fractal capacitors created using a single layer at the expense of a lower quality factor. © 2012 The Institution of Engineering and Technology.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Sensors Lab
Citation:
Elshurafa AM, Salama KN (2012) Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications. Micro & Nano Letters 7: 419. doi:10.1049/mnl.2012.0181.
Publisher:
Institution of Engineering and Technology (IET)
Journal:
Micro & Nano Letters
Issue Date:
23-Jul-2012
DOI:
10.1049/mnl.2012.0181
Type:
Article
ISSN:
17500443
Additional Links:
http://link.aip.org/link/MNLIBX/v7/i5/p419/s1&Agg=doi
Appears in Collections:
Articles; Sensors Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorElshurafa, Amro M.en
dc.contributor.authorSalama, Khaled N.en
dc.date.accessioned2012-07-23T10:10:26Z-
dc.date.available2012-07-23T10:10:26Z-
dc.date.issued2012-07-23en
dc.identifier.citationElshurafa AM, Salama KN (2012) Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications. Micro & Nano Letters 7: 419. doi:10.1049/mnl.2012.0181.en
dc.identifier.issn17500443en
dc.identifier.doi10.1049/mnl.2012.0181en
dc.identifier.urihttp://hdl.handle.net/10754/235134en
dc.description.abstractIn this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S-band frequencies. The self-resonant frequencies of the fabricated capacitors were close to 10GHz, which is better than that of the parallel-plate capacitor, which measured only 5.5GHz. Further, the presented capacitors provided a higher capacitance when compared with the state-of-the-art-reported MEMS fractal capacitors created using a single layer at the expense of a lower quality factor. © 2012 The Institution of Engineering and Technology.en
dc.language.isoenen
dc.publisherInstitution of Engineering and Technology (IET)en
dc.relation.urlhttp://link.aip.org/link/MNLIBX/v7/i5/p419/s1&Agg=doien
dc.rightsArchived with thanks to Micro & Nano Lettersen
dc.subjectRF MEMSen
dc.subjectFractalen
dc.subjectcapacitoren
dc.titleTwo-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applicationsen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentSensors Laben
dc.identifier.journalMicro & Nano Lettersen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorElshurafa, Amro M.en
kaust.authorSalama, Khaled N.en
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