Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems

Handle URI:
http://hdl.handle.net/10754/233791
Title:
Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems
Authors:
Alfadhel, Ahmed ( 0000-0003-3244-0644 )
Abstract:
This dissertation reports the fabrication and characterization of integrated micro sensors consisting of magnetostrictive 500 μm long cantilevers or bridges and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo and their magnetic properties are optimized by field annealing resulting in a coercivity of 2.4 Oe. An alternating current applied to the interrogation elements magnetizes the magnetostrictive structures, and their longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The significance of using magnetostrictive micro beams is the high resonant frequency of the longitudinal vibration compared to transverse vibration, which can be exploited to develop sensors of high sensitivity.
Advisors:
Kosel, Jürgen ( 0000-0002-8998-8275 )
Committee Member:
Foulds, Ian G.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Program:
Electrical Engineering
Issue Date:
Jan-2012
Type:
Thesis
Appears in Collections:
Theses; Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.advisorKosel, Jürgenen
dc.contributor.authorAlfadhel, Ahmeden
dc.date.accessioned2012-07-15T06:56:39Z-
dc.date.available2012-07-15T06:56:39Z-
dc.date.issued2012-01en
dc.identifier.urihttp://hdl.handle.net/10754/233791en
dc.description.abstractThis dissertation reports the fabrication and characterization of integrated micro sensors consisting of magnetostrictive 500 μm long cantilevers or bridges and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo and their magnetic properties are optimized by field annealing resulting in a coercivity of 2.4 Oe. An alternating current applied to the interrogation elements magnetizes the magnetostrictive structures, and their longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The significance of using magnetostrictive micro beams is the high resonant frequency of the longitudinal vibration compared to transverse vibration, which can be exploited to develop sensors of high sensitivity.en
dc.language.isoenen
dc.subjectMagnetostrictionen
dc.subjectMagnetoelasticen
dc.subjectMicrofabricationen
dc.subjectCantileveren
dc.subjectSensoren
dc.titleMicrofabrication of Magnetostrictive Beams for Integrated Sensor Systemsen
dc.typeThesisen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberFoulds, Ian G.en
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.nameMaster of Scienceen
dc.person.id113177en
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