Advanced Nanofabrication Process Development for Self-Powered System-on-Chip

Handle URI:
http://hdl.handle.net/10754/134734
Title:
Advanced Nanofabrication Process Development for Self-Powered System-on-Chip
Authors:
Rojas, Jhonathan Prieto ( 0000-0001-7848-1121 )
Abstract:
In this work the development of a Self-Powered System-On-Chip is explored by examining two components of process development in different perspectives. On one side, an energy component is approached from a biochemical standpoint where a Microbial Fuel Cell (MFC) is built with standard microfabrication techniques, displaying a novel electrode based on Carbon Nanotubes (CNTs). The fabrication process involves the formation of a micrometric chamber that hosts an enhanced CNT-based anode. Preliminary results are promising, showing a high current density (113.6mA/m2) compared with other similar cells. Nevertheless many improvements can be done to the main design and further characterization of the anode will give a more complete understanding and bring the device closer to a practical implementation. On a second point of view, nano-patterning through silicon nitride spacer width control is developed, aimed at producing alternative sub-100nm device fabrication with the potential of further scaling thanks to nanowire based structures. These nanostructures are formed from a nano-pattern template, by using a bottom-up fabrication scheme. Uniformity and scalability of the process are demonstrated and its potential described. An estimated area of 0.120μm2 for a 6T-SRAM (Static Random Access Memory) bitcell (6 devices) can be achieved. In summary, by using a novel sustainable energy component and scalable nano-patterning for logic and computing module, this work has successfully collected the essential base knowledge and joined two different elements that synergistically will contribute for the future implementation of a Self-Powered System-on-Chip.
Advisors:
Hussain, Muhammad Mustafa ( 0000-0003-3279-0441 )
Committee Member:
Foulds, Ian G.; Kosel, Jürgen ( 0000-0002-8998-8275 )
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Program:
Applied Mathematics and Computational Science
Issue Date:
Nov-2010
Type:
Thesis
Appears in Collections:
Applied Mathematics and Computational Science Program; Theses; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.advisorHussain, Muhammad Mustafaen
dc.contributor.authorRojas, Jhonathan Prietoen
dc.date.accessioned2011-06-28T07:37:52Z-
dc.date.available2011-06-28T07:37:52Z-
dc.date.issued2010-11en
dc.identifier.urihttp://hdl.handle.net/10754/134734en
dc.description.abstractIn this work the development of a Self-Powered System-On-Chip is explored by examining two components of process development in different perspectives. On one side, an energy component is approached from a biochemical standpoint where a Microbial Fuel Cell (MFC) is built with standard microfabrication techniques, displaying a novel electrode based on Carbon Nanotubes (CNTs). The fabrication process involves the formation of a micrometric chamber that hosts an enhanced CNT-based anode. Preliminary results are promising, showing a high current density (113.6mA/m2) compared with other similar cells. Nevertheless many improvements can be done to the main design and further characterization of the anode will give a more complete understanding and bring the device closer to a practical implementation. On a second point of view, nano-patterning through silicon nitride spacer width control is developed, aimed at producing alternative sub-100nm device fabrication with the potential of further scaling thanks to nanowire based structures. These nanostructures are formed from a nano-pattern template, by using a bottom-up fabrication scheme. Uniformity and scalability of the process are demonstrated and its potential described. An estimated area of 0.120μm2 for a 6T-SRAM (Static Random Access Memory) bitcell (6 devices) can be achieved. In summary, by using a novel sustainable energy component and scalable nano-patterning for logic and computing module, this work has successfully collected the essential base knowledge and joined two different elements that synergistically will contribute for the future implementation of a Self-Powered System-on-Chip.en
dc.language.isoenen
dc.subjectSelf-Powered System-On-Chipen
dc.subjectNovel sustainable energy componenten
dc.subjectScalable nano-patterningen
dc.titleAdvanced Nanofabrication Process Development for Self-Powered System-on-Chipen
dc.typeThesisen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberFoulds, Ian G.en
dc.contributor.committeememberKosel, Jürgenen
thesis.degree.disciplineApplied Mathematics and Computational Scienceen
thesis.degree.nameMaster of Scienceen
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